| Preliminary M510 Product Information |
Introducing WaveFront's M510!
The M510 is an integrated, ultra-high speed, high resolution optical MEMS measurement and analysis system.
When combined with the OmniVue XP analysis software, the system becomes an ideal tool for fast, accurate analysis
of the electrodynamic behavior of Optical MEMS components.
The M510 provides all electro-optic stimulus and measurement capabilities necessary to fully characterize mirror actuation
response in one compact instrument.
Simple, one box solution, including integrated MEM thermal management.
Tight syncronization of source voltage and measurement capabilities ensures the highest possible accuracy available.
Key M510 Features:
 Ultra-Accurate Mirror Deflection Angle Measurement Capability |
Full X-Y Automated Alignment |
| Ultra-High Speed Mirror Time Response Measurement Capability |
DUT Grid Size up to 15mm X 15mm |
| 2 Independent User Programmable Arbitrary WaveForm Generators |
4 Independent User Progammable Static Voltage Channels |
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| M510 Measurement/Analysis Overview |
DFT Analysis
Perform DFT(Discrete Fourier Analysis) of time domain data to determine parameters as;
Resonant Frequency, Phase Response, Group Delay and Overall System Frequency Response. |
Impulse/Step Response
Perform Impulse/Step Response Analyis to determine critical control parameters as;
Time Delay Response, Position Error, Energy-Time Envelope, Settling Time, OverShoot, UnderShoot, etc. |
MLS Response
Perform all parametric analysis on time domain data as the Impulse method, but with greatly increased noise immunity
using proprietary MLS based stimulus.
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Voltage Sweep Response
All classic Voltage Sweep Response information can be accurately measured from voltage response data. Parameters such as; Actuation
Voltage, Release Voltage and Angle vs. Voltage Response can be easily and precisely determined.
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MEM Thermal Management
The M510 can be easily be configured to ramp until a givin set point is reached |
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Soak for a specified time period (with or without temperature). |
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| Other Key M510 Hardware Features |
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M510 Ultra-High Speed Precision Optical MEMS Measurement System